Poly-silicon nanowire sensor for sodium chloride concentration measurement

Issue title: Frontiers in Biomedical Engineering and Biotechnology – Proceedings of the 2nd International Conference on Biomedical Engineering and Biotechnology, 11–13 October 2013, Wuhan, China

Article type: Research Article

Authors: Kan, Yao-Chiang | Hsu, Cheng-Chih^; | Ho, Wen-Kai | Wu, Tsai-Chen | Ho, Yao-Yaun | Yang, Chia Yu

Affiliations: Department of Communications Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li, 32003 Taiwan | Department of Photonics Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li, 32003 Taiwan

Note: [] Corresponding author. E-mail address: [email protected]

Abstract: In this paper, the poly-Si nanowire sensor was fabricated by top-down technique for sodium chloride concentration measurement. The results showed that the smallest threshold voltage and the best resolution were 1.65 V and 0.41 μM, respectively. Furthermore, the sensor can be reused more than 50 times which maintained acceptable performance and showed good linearity of the calibration within wide range of the concentration. Based on these results, it can be concluded that the proposed sensor has great potential to be used for measuring complicated sample with suitable modification on the surface of nanowires.

Keywords: NaCl concentration, poly-silicon nanowire, ion sensitive field-effect transistor

DOI: 10.3233/BME-130788

Journal: Bio-Medical Materials and Engineering, vol. 24, no. 1, pp. 95-99, 2014