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Resonant efficiency improvement design of piezoelectric biosensor for bacteria gravimetric sensing

Issue title: Frontiers in Biomedical Engineering and Biotechnology – Proceedings of the 3rd International Conference on Biomedical Engineering and Biotechnology, 25–28 September 2014, Beijing, China

Article type: Research Article

Authors: Tsai, Jang-Zern | Chen, Ching-Jung; | Shie, Dung-Ting | Liu, Jen-Tsai;

Affiliations: Department of Electrical Engineering, National Central University, No.300, Jhongda Rd., Jhongli City, Taoyuan County 32001, Taiwan, R.O.C. | School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China | The College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China

Note: [] Corresponding authors: Ching-Jung Chen, School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China. Tel.: +86-13261037737; Fax: +86-010-88256701; E-mail: [email protected]. Jen-Tsai Liu, The College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China. Tel.: +86-15652782159; Fax: +86-010-88256701; E-mail: [email protected].

Note: [] Corresponding authors: Ching-Jung Chen, School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China. Tel.: +86-13261037737; Fax: +86-010-88256701; E-mail: [email protected]. Jen-Tsai Liu, The College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China. Tel.: +86-15652782159; Fax: +86-010-88256701; E-mail: [email protected].

Keywords: Lead zirconate titanate (PZT), piezoelectric, biosensor, resonance-frequency, escherichia coli (E. coli)

DOI: 10.3233/BME-141186

Journal: Bio-Medical Materials and Engineering, vol. 24, no. 6, pp. 3597-3604, 2014

Published: 2014
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Abstract

The piezoelectric biosensor have been widely used in ultra-small mass detection of biomolecular, based on PZT piezoelectric material can create a variety of compositions geometrically; it could widely develop a high-frequency resonator and measure the change of the slightest mass while improve the limited detection simultaneously. Therefore, the piezoelectric biosensor of this study was fabricated by a spin-coating method and backside etching process for improving the characteristic of piezoelectric biosensor. The result exhibited that the 250 μm × 250 μm working size has the most favorable piezoelectric characteristic. The tunability was approximately 38.56 % and it showed that reducing the substrate thickness could obtain a clear resonance signal in a range of 60 to 380 MHz. In theory calculated for gravimetric sensing, it could achieve 0.1 ng sensing sensitivity. In gravimetric sensing, the sensing range was between 50,000~100,000 CFU/ml. Sensing range was lower in clinical urinary tract infection (100,000 CFU/ml), thus demonstrating its usefulness for preventive medicine. It can understand the piezoelectric sensor of this study has potential application in the future for biomedical gravimetric sensing.

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