Affiliations: [a] College of Communication Engineering, Jilin University, Chang Chun, China | [b] International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Chang Chun, China | [c] Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Chang Chun, China
Correspondence:
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Corresponding authors: Liqun Cheng, College of Communication Engineering, Jilin University, Chang Chun, China; International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Chang Chun, China; and Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Chang Chun, China. E-mail: [email protected]. Wanzhong Chen, College of Communication Engineering, Jilin University, Chang Chun, China. E-mail: [email protected]
Abstract: Piezoelectric actuator (PEA) is widely applied in the field of micro/nano high precision positioning. However PEA has the phenomenon of hysteresis non-linearity between input voltage and output displacement, due to the natural property of piezoelectric materials. The PEA hysteresis can be compensated by hysteresis models, which makes the input voltage and output displacement more linearity. The research work on compensation of PEA hysteresis by using various hysteresis models has been being a hot topic. This paper presents a modified direct inverse rate-independent Prandtl–Ishlinskii (PI) (MDIPI) model for compensating the hysteresis of PEA. The proposed MDIPI model has two different sets of operators compared with classical PI (CPI) model having one set of operators. For the two sets operators in MDIPI model one is rate operators and the other is modified classical operators. By combining the two sets operators, the MDIPI model has the properties of the adaption and accuracy in hysteresis compensation. The MDIPI model can be used as feedforward controller to compensate different reference trajectories. Parameters of MDIPI model are calculated by matlab optimization tool box. The experiments of compensating the complex displacement trajectory and sinusoidal trajectory are validated on a platform of commercial PEA. The MDIPI model has achieved more accurate results than the Krasnosel’skii–Pokrovkii (KP), Preisach and CPI models. It is effective in improving the accuracy of PEA hysteresis compensation.
