A piezo driver for piezoelectric bimorph actuators in micro-positioning application

Issue title: Selected papers from the International Symposium on Applied Electromagnetics and Mechanics - ISEM 2019

Guest editors: Jinhao Qiu, Ke Xiong and Hongli Ji

Article type: Research Article

Authors: Chen, Yuansheng^a | Zhao, Pengcheng^a | Wang, Hao^a; | Qiu, Jinhao^b | Yang, Guowen^a

Affiliations: [a] School of Energy and Power Engineering, Nanjing University of Science and Technology, Nanjing, China | [b] State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing, China

Correspondence: [*] Corresponding author: Hao Wang, School of Energy and Power Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu, China. Tel.: +86 25 84313534; E-mail: [email protected]

Abstract: Piezo driver for piezoelectric bimorph actuators is the key component for micro-positioning application. Hysteresis nonlinearity of piezoelectric bimorph actuators limits the performance of micro-positioning systems. A novel piezo driver was developed with Prandtl-Ishlinskii (P-I) model and correction network. The combination of P-I model and correction network can describe the rate-dependent hysteresis. Experiments were performed to validate the proposed piezo driver. The results show that the piezo driver can compensate the hysteresis of the piezoelectric bimorph actuator in the frequency range of 0.1 Hz to 10 Hz, and the accuracy of micro-positioning have been greatly improved.

Keywords: Piezoelectric bimorph actuator, hysteresis compensation, piezo driver

DOI: 10.3233/JAE-209371

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 64, no. 1-4, pp. 615-620, 2020