Quartz force-sensitive resonator cluster using energy trapping theory

Article type: Research Article

Authors: Chen, Fubin^{a; b; *} | Gao, Jinchun^a | Tian, Wenjie^b

Affiliations: [a] School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China | [b] Sensor Key Laboratory, Beijing Information Science and Technology University, Beijing 100101, China

Correspondence: [*] Correspondence: Fubin Chen, Beijing Information Science and Technology University, 35 North Fourth Ring Road, Beijing 100101, China. E-mail: [email protected].

Abstract: The quartz resonator can be used as a force-sensitive element for sensors. The resonance energy distribution of thickness-shear quartz crystal is derived and calculated using the energy trapping theory. To reduce temperature and other interference factors as well as improve force-sensitivity, a multi-electrode force-sensitive resonator cluster is designed based on resonance energy distribution results. The output frequency signals of the resonator cluster are subtracted from each other to form beat frequency signals to suppress the temperature and other interference factors using the common mode rejection principle. Next, the beat frequency signals are superimposed to improve the overall force-sensitivity of the quartz crystal resonator cluster. The experimental results show that the temperature characteristics of the quartz resonator cluster are better than the traditional single electrode resonator and that the frequency stability reaches 10-10 orders of magnitude. The overall force-frequency coefficient of the resonator cluster increases to 9992 Hz/N.

Keywords: Quartz force-sensitive resonator cluster, thickness-shear quartz crystal, energy trapping

DOI: 10.3233/JAE-170133

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 57, no. 2, pp. 165-175, 2018