Multi-field coupled free vibration for a micro resonant pressure sensor

Subtitle:

Article type: Research Article

Authors: Xu, Lizhong^* | Wang, Zhichong

Affiliations: Mechanical Engineering School, Yanshan University, Qinhuangdao, Hebei, China

Correspondence: [*] Corresponding author: Lizhong Xu, Mechanical Engineering Institute, Yanshan University, Qinhuangdao 066004, Hebei, China. E-mail: [email protected]

Abstract: The micro resonant pressure sensor is attractive because it outputs the frequency signals. As the dimensions of the sensor decreases, the effects of the van der Waals forces and the electrostatic forces on its dynamics performance should be considered. It is a multi-field coupled dynamics problem. Here, the dynamic equations of the micro resonant beam for the micro resonant pressure sensor under multi-field coupled situations are deduced. Using these equations, the effects of the van der Waals force or the electrostatic force on the natural frequencies of the micro resonant beam are investigated. The effects become more obvious under certain conditions. The results are useful to improve design about dynamics performance for the micro resonant pressure sensor.

Keywords: Multi-field coupled, free vibration, micro resonant pressure sensor, natural frequency

DOI: 10.3233/JAE-140128

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 48, no. 1, pp. 21-31, 2015