Affiliations: [a] IEF, UMR, University Paris Sud/CNRS, Orsay,
France | [b] CNRS/University Paris Sud/UPMC, Gif-Sur-Yvette,
France | Université Laval, Canada | Tohoku University, Japan
Correspondence:
[*]
Corresponding author: Tao Peng, IEF, UMR 8622, University Paris
Sud/CNRS, Bât. 220 Rue André Ampère, 91405, Orsay, France.
E-mail: [email protected]
Abstract: Multilayered magneto-impedance microsensors (Finemet/Copper/Finemet)
were elaborated by microfabrication process using bi-layers lift-off method. A
post-annealing step was carried out at 300°C for 1h under magnetic field,
which led to induce a longitudinal or transversal anisotropy in the magnetic
films. A method based on a double amplitude demodulation was proposed for the
sensitivity characterization corresponding to the AC magnetic field measurement
capability. According to these alternating magnetic field characterizations,
the sensitivity, the linearity and the bandwidth of the microsensor were
obtained. The highest sensitivity is around 4200 Ω/T and the measurable
sensor bandwidth reaches up to 300 kHz. The sensor presented no hysteresis
since a DC bias field larger than anisotropy field is applied.
Keywords: Magneto-impedance micro sensor, AC measurement, alternating field
