Affiliations: [a] State Key Lab of Digital Manufacturing Equipment and
Technology, Huazhong University of Science and Technology, Wuhan, Hubei, China | [b] School of Mechanical and Electronic Engineering, Wuhan
University of Technology, Wuhan, Hubei, China
Correspondence:
[*]
Corresponding author: Xin Cheng, School of Mechanical {and}
Electronic Engineering, Wuhan University of Technology, Wuhan, Hubei, China.
Tel.: +86 189 710 758 52; Fax: +86 027 875 573 24; E-mail: [email protected]
Abstract: Magnetically levitated planar actuators can simplify the planar
motion mechanism and thus realize high-speed and high-accuracy motion. The
accuracy in the shape of coil, a core part of magnetically levitated planar
actuator, is crucial to the performance of actuator. Although the foil-wound
coil has high forming precision, the strong eddy current generated in the
motion of actuator may pose great interference to magnetic levitation and
deteriorate system stability. Based on a thorough analysis of the eddy current
and eddy-current force of foil-wound coils in the magnetically levitated planar
motion, the paper proposes the calculation model for disturbing eddy force.
Results from the simulation show that the model has a relatively high accuracy.
It is also indicated that further predictive compensation for the eddy force in
the control of precise magnetically levitated actuators can increase the
kinematic accuracy and stability of magnetically levitated planar motion system.
Keywords: Magnetic levitated planar actuators, foil-wound coil, eddy-current, eddy current force, halbach permanent magnet array
