Affiliations: [a] Department of Electrotechnics and Measurements,
Technical University of Cluj-Napoca, Cluj-Napoca, Romania | [b] Department of Industrial and Information Engineering,
University of Pavia, Pavia, Italy | [c] Faculty of Electrical, Electronic, Computer and
Control Engineering Łódź University of Technology,
Łódź, Poland
Correspondence:
[*]
Corresponding author: R. Chereches, Department of
Electrotechnics and Measurements, Technical University of Cluj-Napoca,
RO-400027, Cluj-Napoca, Romania. E-mail: [email protected]
Abstract: A procedure of automated optimal design of a class of
micro-electromechanical devices is proposed in terms of a multiobjective
optimization formulation. A comb-drive electrostatic accelerometer is
considered as the case study. By optimizing the shape design of the device, it
is desired to extend the actuation range of the comb drive in steady-state
conditions, leading to greater gap distances between the electrodes. The design
variables control the geometry of fixed and movable electrodes, in terms of
width and height. The twofold goal of maximizing the drive force considered as
the main criterion, while minimizing the levitation force considered as a
parasitic effect, makes it possible to implement a Pareto optimality approach.
Keywords: Multiobjective optimization, finite-element analysis, electric field, MEMS
