Affiliations: [a] Key Laboratory of Micro Inertial Instrument and
Advanced Navigation Technology of Ministry of Education, Southeast University,
Nanjing, Jiangsu, China | [b] School of Instrument Science and Engineering,
Southeast University, Nanjing, Jiangsu, China
Correspondence:
[*]
Corresponding author: Hongsheng Li, Key Laboratory of Micro
Inertial Instrument and Advanced Navigation Technology of Ministry of
Education, Southeast University, No.2 Sipailou, Nanjing 210096, Jiangsu, China.
E-mail: [email protected]
Abstract: A novel method is investigated in this paper to estimate the
temperature's influence upon the resonant frequency (RESF) and quality factor
(Q) of a vacuum packaged Micro-Electro-Mechanical-System (MEMS) gyroscope,
which can give suggestions to improve the architecture's temperature
robustness. The dual-mass decoupled gyroscope's architecture is introduced, and
the drive and sense modes' mechanical character are analyzed. The models of
RESF and damping are established, and the influence factors are investigated.
Four samples are tested and the results indicate that the models can estimate
and evaluate the tendency of the RESF and Q in different temperature. The
investigation also considers the Young Modulus is the dominate element
influencing RESF and increasing the thickness and width of the U-shaped spring
can decrease this influence; Q is impacted mainly by the air viscosity
coefficient and ambient pressure. The errors of the models are caused by
manufacture error and the air getter's influence.
Keywords: MEMS gyroscope architecture, resonant frequency, damping, temperature robustness
