Analysis of dynamic response of plasma polymer film-coated quartz crystal resonator sensor

Issue title: ICMIT2011

Guest editors: Kazuhiko Takahashi and Minoru Sasaki

Article type: Research Article

Authors: Takahashi, Kazuhiko^{a; *} | Iwamuro, Yusuke^b | Sugimoto, Iwao^c

Affiliations: [a] Doshisha University, Kyoto, Japan | [b] Graduate School of Doshisha University (currently TIS Inc.), Kyoto, Japan | [c] Tokyo University of Technology, Tokyo, Japan | Doshisha University, Kyoto, Japan | Department of Human and Information Systems, Faculty of Engineering, Gifu University, Gifu, Japan

Correspondence: [*] Corresponding author: Kazuhiko Takahashi, Doshisha University, 1-3 Miyakodani Tatara Kyotanabe Kyoto, Japan. Tel.: +81 774 656 434; Fax: +81 774 656 434; E-mail: [email protected]

Abstract: This paper proposes a mathematical model of a mass-sensitive chemical sensor with a plasma polymer film (PPF)-coated quartz crystal resonator (QCR) that can be used to process signals from gas sensing systems that are operated under ambient conditions. To approximate the responses of the PPF-coated QCR sensor to the sample gas, a mathematical model based on the diffusion equation (assuming the one-dimensional Fickian diffusion of the sample gas molecules into the sensor film) is investigated based on the assumption that the sorption/desorption phenomena occur in the vicinity of the PPF surface. Computational experiments show the feasibility of the proposed mathematical model for estimating the response of the PPF-coated QCR sensor.

Keywords: Plasma polymer film, quartz crystal resonator, chemical sensor, diffusion equation, dynamic model

DOI: 10.3233/JAE-121625

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 41, no. 1, pp. 39-49, 2013