Analysis on the adhesion of micro-comb structure in MEMS

Issue title: Selected Papers from the 14th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2009), Part II

Article type: Research Article

Authors: Liu, Haipeng^{a; *} | Gao, Shiqiao^a | Niu, Shaohua^a | Jin, Lei^a

Affiliations: [a] State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, 5 South Zhongguancun Street, Haidian District, Beijing, 100081, China

Correspondence: [*] Corresponding author. E-mail: [email protected]

Abstract: The comb capacitive micromachined gyroscope is a kind of typical MEMS sensor. Electrostatic driving and comb capacitive detection are its typical working mode. Recently, researchers have found that the narrow space between two combs can result in comb adhesion easily because of micro scaling effect. In this paper, some micro forces such as capillary force, Van der Waals force, electrostatic force and Casimir force were analyzed and the relation curves of micro force and its acting distance were obtained. In order to make sure the influences of relative humidity on the micro-combs, a contrast experiment was also carried out. Through analysis on the micro forces, the acting distance curves of micro forces were finally obtained.

Keywords: Micro-comb structure, adhesion, capacitive micromachined gyroscope, micro forces

DOI: 10.3233/JAE-2010-1210

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 33, no. 3-4, pp. 979-984, 2010