Fabrication of copper-nanoparticle embedded in amorphous carbon films and their electrical conductive properties

Issue title: Selected Papers from the 14th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2009), Part II

Article type: Research Article

Authors: Takeno, Takanori^a | Ohno, Takeshi^b | Miki, Hiroyuki^c | Takagi, Toshiyuki^{c; *}

Affiliations: [a] Institute of International Advanced Interdisciplinary Research, Tohoku University Advanced Research and Education Organization, Aoba 6-3, Aramaki, Aoba-ku, Sendai 980-8578, Japan | [b] Graduate School of Engineering, Tohoku University, Aoba 6-6-1, Aramaki, Aoba-ku, Sendai 980-8579, Japan | [c] Institute of Fluid Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan

Correspondence: [*] Corresponding author: Professor T. Takagi, Institute of Fluid Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan. Tel.: +81 22 217 5298 (Dr. Miki), +81 22 217 5248 (Prof. Takagi); Fax: +81 22 217 5298 (Dr. Miki), +81 22 217 5248 (Prof. Takagi); E-mail: [email protected] (Dr. Miki), [email protected] (Prof. Takagi)

Abstract: Electrical conductive properties of copper-carbon composite coatings were investigated. Films of several hundred nanometers were deposited onto dielectric substrates using acetylene-generated plasma and co-sputtering of copper target. Transmission electron microscope was employed for the analyses of the microstructure of the coatings. Temperature dependence of resistance of the investigated coatings was measured by changing the temperature from 80–400 K in vacuum condition. Electrical conductive properties were discussed in terms of the microstructure of the coatings deposited under the various conditions.

Keywords: copper, amorphous carbon, nano-particle, electrical conductive properties

DOI: 10.3233/JAE-2010-1204

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 33, no. 3-4, pp. 935-940, 2010