Affiliations: [a] Graduate School of Engineering, Tohoku University,
Aoba 6-6-1, Aramaki, Aoba-ku, Sendai 980-8579 Japan | [b] Institute for International Advanced Interdisciplinary
Research, Tohoku University International Advanced Research and Education
Organization, Aoba 6-3, Aramaki, Aoba-ku, Sendai 980-8578, Japan | [c] Institute of Fluid Science, Tohoku University,
Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
Correspondence:
[*]
Corresponding author: Prof. T. Takagi, Institute of Fluid
Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan.
Tel.: +81 22 217 5268; Fax: +81 22 217 5268; E-mail: [email protected]
Abstract: The strain properties of the W-DLC coatings were evaluated. W-DLC
coatings with various concentrations were prepared by chemical vapor deposition
and DC magnetron co-sputtering of a tungsten metal target. Strain was applied
to a sample in a four-point bending configuration. The electrical resistance
was proportional to the amount of compression and tensile strain, and the gauge
factor varied according to the metal concentration. Transmission electron
microscope was employed for structure analyses. It was clarified that the
structure of the W-DLC was granular. The variation of the resistance under the
strain could be explained by a simplified model related to the distance between
the clusters. The W-DLC coatings have the potential for strain sensor application.
Keywords: Amorphous carbon, strain sensor, smart material
