Research for a new actuator with variable step and large displacement

Issue title: Selected Papers from the 14th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2009), Part I

Article type: Research Article

Authors: Zhang, Zhijun^a | Xu, Minglong^{a; *} | Feng, Bo^a | Zhang, Xinong^a

Affiliations: [a] MOE Key Laboratory for Strength and Vibration, School of Aerospace, Xi'an Jiaotong University, Xi'an 710049, P.R. China

Correspondence: [*] Corresponding author: Minglong Xu, MOE Key Laboratory for Strength and Vibration, School of Aerospace, Xi'an Jiaotong University, Xi'an 710049, P.R. China. Tel.: +86 13119127899, +86 13892890998; Fax: +86 029 82669093; E-mail: [email protected]

Abstract: A new inchworm-type piezoelectric actuator with round trip, variable step, large displacement is presented in this paper. It has two parts: the clamping structure, the pushing structure. Experiment system with high voltage drivers and closed-loop control system is designed. Dynamic model for piezoelectric actuator is built up. This actuator can move a displacement of ± 8 mm. Dynamic performance of the actuator is simulated by the MATLAB Simulink, and the results of simulation is in agreement with that of the experiment in 30 nanometer accuracy demanded.

Keywords: Inchworm, variable step, closed-loop, simulink

DOI: 10.3233/JAE-2010-1163

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 33, no. 1-2, pp. 597-604, 2010