Optimization of a 3D micro-accelerometer based on diamagnetic levitation

Issue title: OIPE 2008

Article type: Research Article

Authors: Pigot, Ch.^a | Delinchant, B.^{a; *} | Poulin, G.^b | Reyne, G.^a

Affiliations: [a] G2ELab (Grenoble Electrical Engineering Lab), (UMR 5529 INPG-UJF-CNRS), Saint-Martin-d'Heres Cedex, France | [b] INSERM (Univ. Tours – Inserm U930 – CNRS FRE2448), Tours Cedex, France

Correspondence: [*] Corresponding author: B. Delinchant, G2ELab (Grenoble Electrical Engineering Lab), (UMR 5529 INPG-UJF-CNRS), ENSE3 961 rue de la Physique – BP 46 – 38402 Saint-Martin-d'Heres Cedex, France. Tel.: +33 (0)476 827 154; Fax: +33 (0)476 82 63 00; E-mail: [email protected]

Abstract: Scale reduction improves the amplitude of diamagnetism. Thus diamagnetic levitation is possible at the microscale with simple micromagnets. The present work aims at comparing the performances of this levitation at the microscale with other well established technologies. A device including a levitating magnet in a diamagnetic box is optimized in order to fulfil the requirements of three different markets in the acceleration sensing field. It is shown that this technology fulfils the requirements for medium range and short time response markets. However, the use of small proof mass limits the resolution of high precision sensors.

Keywords: Diamagnetic levitation, microaccelerometer, market specification, micromagnet, semi-analytical modeling, optimization

DOI: 10.3233/JAE-2009-1020

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 30, no. 3-4, pp. 179-188, 2009