Affiliations: [a] School of Electrical Engineering and Computer Science,
Seoul National University, Kwanak-gu, Seoul, Korea | [b] Korea Electrical Engineering and Science Research
Institute, Kwanak-gu, Seoul, Korea | [c] School of Electrical Engineering and Computer Science,
Seoul National University, Kwanak-gu, Seoul, Korea
Abstract: The exact analysis of the piezoelectric motor has been impossible to
the present time, although many researchers have proposed various kinds of
analysis method for the piezoelectric motor using numerical method or analytic
method. Also, the arranged design method has not been suggested for the
Ultra-Sonic Motor (USM) taking the characteristic into account. In order to
address these problems, we propose the analysis and design method for the USM
using analytic method combined with numerical method. This method was named as
the Cutting Method (CM) in this paper. The 8.5[mm] diameter
Rotary Ultra-Sonic Motor (RUSM) is developed using the CM to verify the
suggested method and for the demand of small actuators in industry. Finally,
the proposed analysis and design method was validated by comparing its outcomes
with the experimental data. For the vibrator of the proposed 8.5[mm] diameter
RUSM, four kinds of comb-tooth structures were prototyped in this research.
Hence, the relation between the speed of the motor and the number of teeth is
revealed for the first time. This is noteworthy because the tooth design method
has not been proposed and because this result also verified the proposed CM.
Keywords: Actuator, analysis, design, FEM, FDM, rotary motor, piezoelectric, small size, ultrasonic motor
