BEM simulation of laser trimmed hybrid IC resistors

Issue title: Special Volume: Proceedings of the eleventh International Symposium on Applied Electromagnetics and Mechanics ISEM-Versailles ISEM 03

Article type: Research Article

Authors: Schimmanz, Klaus^a | Kost, Arnulf^{a; *}

Affiliations: [a] Chair of Fundamentals in Electrical Engineering and Computational Electromagnetics, TU Cottbus, Universitätsplatz 3-4, 03044 Cottbus, Germany. E-mail: [email protected]; [email protected]

Correspondence: [*] Corresponding author

Abstract: The capability of hybrid Integrated Circuits (IC) depends essentially on resistor precision. This is nowadays achieved by laser trimming of film resistors. This process can be highly supported by a robust method of computational electromagnetics. The paper shows how the Boundary Element Method (BEM) is used to simulate important quantities of the process.

Keywords: film resistor design, laser trimming, boundary element method

DOI: 10.3233/JAE-2004-572

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 19, no. 1-4, pp. 253-256, 2004