Development of a megasonic cleaner for TFT LCD manufacturing

Issue title: ICMIT '01

Article type: Research Article

Authors: Kim, Hie-Sik^{a; *} | Choi, Gi Sang^a

Affiliations: [a] Department of Electrical and Computer Engineering, University of Seoul, Seoul, Korea

Correspondence: [*] Corresponding author. Department of Electrical and Computer Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemoon-gu, Seoul, 130-743, Korea. Tel.: +82 2 2210 2427; Fax: +82 2 2213 6802; E-mail: [email protected]

Abstract: The yield rate in fabrication of TFT LCD's (thin film transistor liquid crystal display) with high pixel density is strongly dependent upon the effectiveness of precision cleaning method. Ultrasonic cleaners operating at high frequencies (typically above 1 MHz, megasonic cleaners) are known to be effective in removing submicron contaminants without causing mechanical damage to the surface. In this study a megasonic cleaner for TFT LCD manufacturing process is developed and its performance is evaluated through experiments. The experimental results show that the developed megasonic cleaner is effective in removing very small particles from the LCD panels.

Keywords: ultrasonic cleaner, TFT LCD

DOI: 10.3233/JAE-2003-273

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 18, no. 1-3, pp. 41-51, 2003