Feasibility study of an electrostatic actuator by finite element interaction analysis

Article type: Research Article

Authors: Hamamoto, Masaki^a | Hisada, Toshiaki^{a; *} | Suzumori, Koichi^b

Affiliations: [a] Department of Mechano-Informatics, School of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan | [b] Research and Development Center, Toshiba Corporation, 4-1 Ukishimacyo, Kawasaki-ku, Kawasaki 210-0862, Japan

Correspondence: [*] Corresponding author. Tel.: +81 3 5802 3379; E-mail: [email protected].

Abstract: A computer simulation program based on a finite element interaction analysis method is developed for the design of electrostatic actuators. The simulation program consists of finite element analysis parts for the hyperelastic structure and electrostatic field, and the interaction analysis part. Because the actuator utilizes structural buckling so as to obtain a larger horizontal stroke, the interaction analysis must take the postbuckling problem into consideration. Therefore, the arc-length method is incorporated into the program. It is demonstrated through a numerical example that satisfactory motion of the actuator can be realized by virtue of structural buckling.

DOI: 10.3233/JAE-1999-144

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 10, no. 3, pp. 249-257, 1999