Strain sensitivity in Tungsten-containing diamond-like carbon films for strain sensor applications

Issue title: Selected Papers from the 13th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2007)

Article type: Research Article

Authors: Takeno, Takanori^a | Miki, Hiroyuki^b | Takagi, Toshiyuki^{b; *}

Affiliations: [a] Institute for International Advanced Interdisciplinary Research, Tohoku University International Advanced Research and Education Organization, Aoba 6-3, Aramaki, Aoba-ku, Sendai 980-8578, Japan | [b] Institute of Fluid Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan

Correspondence: [*] Corresponding author. Tel.: +81 22 217 5248; Fax: +81 22 217 5248; E-mail: [email protected]

Abstract: Tungsten-containing diamond-like carbon (W-DLC) film was investigated with the aim of strain sensor application. Three samples deposited under different methane flow rates were investigated. The strain dependence of normalized resistance has a linear dependence and the gauge factor has positive and negative values. The sensitivity and temperature coefficient of resistance (TCR) increase with an increase in the methane flow rate. However, from a practical point of view the sample with the lowest gauge factor is most appropriate for a stain sensor because it has the smallest TCR of the three samples.

Keywords: Diamond-like carbon (DLC), strain sensor, Tungsten metal

DOI: 10.3233/JAE-2008-978

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 28, no. 1-2, pp. 211-217, 2008