Ferromagnetic shape memory microscanner with large deflection angles

Issue title: E-MRS Fall Meeting 2005

Article type: Research Article

Authors: Brugger, D.^a | Kohl, M.^{a; *} | Krevet, B.^a

Affiliations: [a] Forschungszentrum Karlsruhe GmbH, IMT, Postfach 3640, 76021 Karlsruhe, Germany

Correspondence: [*] Corresponding author. Tel.: +49 7247 82 2798; Fax: +49 7247 82 4331; E-mail: [email protected]

Abstract: A Ni-Mn-Ga microscanner has been developed as a test platform for an experimentally study of the coupled thermal, magnetic and mechanical performance of ferromagnetic shape memory alloy (FSMA) actuators. The microscanner is designed as a double-beam cantilever of a magnetron sputtered Ni-Mn-Ga thin film. The chemical composition of the cantilever is adjusted to simultaneously induce a ferromagnetic and a martensitic phase transformation upon heating. In the presence of a magnetic field, this system can be actuated in two opposite directions by making use of either magnetic or shape recovery forces. Experimental stationary deflections of the actuator are analyzed by finite element simulations. The shape recovery and magnetic forces are calculated along the trajectory of the actuator allowing the determination of stationary equilibrium positions.

DOI: 10.3233/JAE-2006-722

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 23, no. 1-2, pp. 99-105, 2006