Development of magnetically driven microvalve using photosensitive SU-8/Fe composite

Issue title: Proceedings from the 17th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2015)

Guest editors: Fumio Kojima, Futoshi Kobayashi and Hiroyuki Nakamoto

Article type: Research Article

Authors: Suzuki, Junya^a | Terao, Kyohei^a | Takao, Hidekuni^a | Shimokawa, Fusao^a | Oohira, Fumikazu^b | Miyagawa, Hayato^c | Suzuki, Takaaki^{d; e; *}

Affiliations: [a] Department of Intelligent Mechanical Systems Engineering, Kagawa University, Kagawa, Japan | [b] Kagawa Branch, The Open University of Japan, Kagawa, Japan | [c] Department of Advanced Materials Science, Kagawa University, Kagawa, Japan | [d] Division of Mechanical Science of Technology, Gunma University, Gunma, Japan | [e] JST, PRESTO, Japan

Correspondence: [*] Corresponding author: Takaaki Suzuki, Division of Mechanical Science of Technology, Gunma University. 1-5-1, Tenjin-cho, Kiryu, Gunma 376-8515, Japan. Tel./Fax: +81 277 30 1579; E-mail:[email protected]

Abstract: We propose a magnetically driven microvalve made of negative photoresist SU-8 containing magnetic pure iron particles as a magnetically driven actuator and valve element. SU-8/Fe composite forms the magnetically driven component using a photolithography and wet etching. The composite valve element made of SU-8/Fe composite in the microchannel is rotated by the external magnetic field of a permanent magnet. The flow reduction ratio of about 44% and the pressure resistance of 4.6 kPa are experimentally measured on the prototype.

Keywords: SU-8/Fe composite, microvalve, magnetic driving

DOI: 10.3233/JAE-162186

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 52, no. 3-4, pp. 1585-1590, 2016