Journal of X-Ray Science and Technology - Volume 8, issue 3
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Journal of X-Ray Science and Technology is an international journal designed for the diverse community (biomedical, industrial and academic) of users and developers of novel x-ray imaging techniques. The purpose of the journal is to provide clear and full coverage of new developments and applications in the field.
Areas such as x-ray microlithography, x-ray astronomy and medical x-ray imaging as well as new technologies arising from fields traditionally considered unrelated to x rays (semiconductor processing, accelerator technology, ionizing and non-ionizing medical diagnostic and therapeutic modalities, etc.) present opportunities for research that can meet new challenges as they arise.
Abstract: K-edge and Ross filters techniques were used to measure quantitatively the X-ray emission from laser heated Al, Mo, and Ta plasmas in the range of 10 to 100 eV. The INRS Table Top Terawatt laser system using Chirped Pulse Amplification technique supplied a focused laser pulse of about 300 mJ in 450 fs duration at λ=0.53 µm, achieving irradiation intensities on the target surface up to 5× 1017 W/cm². The experimental results are compared to…calculation of the hard X-ray radiation based on bombardment of solid target by electrons. Furthermore, the dependence of X-ray emission on laser energy, irradiation intensity and the target atomic number are discussed.
Abstract: Reflection topographs of annealed Czochralski-grown silicon wafers are made with synchrotron white beam radiation at grazing angles of 0.2 degree to 3 degree. Information on the uniformity of the denuded zone is obtained from a number of grazing incidence topographs, which according to calculations turn out to be almost completely monochromatic having a negligible harmonic content. The calculated penetration depth ranges from 1 to 100 µm depending on the grazing angle and reflection used. The grazing…incidence topographs are compared with section topographs of the same samples.
Abstract: The concept of X-UV Lamellar Multilayer Amplitude Grating (LMAG) is introduced and a method of fabrication is given. Dynamical and kinematic theories of the diffraction by a LMAG are presented. Different applications of the LMAGs are considered. The first one is the achievement of a narrow bandpass multilayer monochromator for the X-UV domain. The second one is the reduction of specular background in the reflectivity curve of a multilayer structure. The third one is the polychromator…system which allows one to split spatially and to perform a spectral sampling of a polychromatic beam. Finally we studied experimentally the behavior of an LMAG in conical mounting.
Abstract: A new action constant for bremsstrahlung has been derived and published by the author (Journal of X-Ray Science and Technology 6, 1996, 261). Experimental confirmation of that action constant by measurements of the intensity of bremsstrahlung produced by electron beams on pure metal targets, has also been published by the author (Journal of X-Ray Science and Technology 7, 1997, 327-330). From the data in the second paper, additional experimental evidence is obtained for this paper by…overcoming the limitations associated with normalization of the number of atoms per unit volume. The dependence of the intensity on the exponent of the atomic number, Z, of the target elements is measured to be 1.32, with a standard deviation of plus or minus 0.05, in close agreement with the predicted value of 4/3.
Abstract: The paper deals with the application of soft X-ray optics to the enhancement of the efficiency of X-ray proximity lithography based on a point X-ray source. The grazing incidence X-ray collimators are shown to increase the efficiency coefficient in several hundreds times. The design of the optimum X-ray collimator is proposed and analysed for the scheme of X-ray proximity lithography with spatial resolution 0.05 µm. The collimator transforms the divergent radiation of an X-ray point source…into high collimated beam that illuminates uniformly the mask at normal incidence.