Method of Eigenvectors for Numerical Studies of Multilayer Gratings

Article type: Research Article

Authors: Erofeev, V. I. | Kovalenko, N. V.

Affiliations: Institute of Automation & Electrometry, Academy of Sciences, 1, Universitetsky pr., Novosibirsk, 630090, Russia | Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences, 11, Lavrentyev pr., Novosibirsk, 630090, Russia

Note: [] E-mail: [email protected]

Note: [] E-mail: [email protected]

Abstract: A new approach to numerical studies of lamellar multilayer gratings is developed. It stands out against the existing modal and differential methods by its applicability to thick multilayer gratings with a small grating period, and also to the case of grazing incidence of radiation. The diffraction properties of multilayer gratings are calculated for x rays with the angles of incidence down to zero. Reflection curves are calculated for multilayer gratings with the grating periods down to 5 nm and the number of bilayers up to 1000. The diffraction pictures are developed for all the range of x-ray radiation (soft and hard x rays). It is directly demonstrated that the multilayer grating can be regarded as a two-dimensional crystal. Numerical calculations based on the newly proposed method were used for the interpretation of experimental data on the performance of the Ni/C multiplayer grating.

DOI: 10.3233/XST-1997-7106

Journal: Journal of X-Ray Science and Technology, vol. 7, no. 1, pp. 71-85, 1997