Thermal Stability of Normal Incidence Multilayer Mirrors for the X-Ray Wavelength near Carbon K-Edge

Article type: Research Article

Authors: Bugaev, E. A. | Fedorenko, A. I. | Kondratenko, V. V. | Zubarev, E. N.

Affiliations: Kharkiv Polytechnic University, Kharkiv, Ukraine

Abstract: Annealing effects in the short-period multilayers Cr3C2/C, TiC/C, Cr3C2/(B + C), and CrB2/C were studied in a wide temperature range ~200–1200°C by x-ray scattering and cross-sectional electron microscopy. It was shown that the thermodynamic equilibrium of the layer materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.

DOI: 10.3233/XST-1995-5306

Journal: Journal of X-Ray Science and Technology, vol. 5, no. 3, pp. 295-306, 1995