Multilayer X-Ray Mirror Calibration by an Energy Dispersive Method Using an X-Ray Tube and a Si(Li) Detector: Absolute Reflectivity, Energy Band Pass, and Overlapping Order Determination

Article type: Research Article

Authors: Dhez, P. | Duval, H. | Malaurent, J. C.

Affiliations: LSAI and LURE, Université Paris Sud, F-91405 Orsay Cedex, France | Laboratoire de Physique des Solides, Bat.503, Université Paris Sud, F-91405 Orsay Cedex, France

Abstract: We describe under which conditions the x-ray energy dispersive method permits absolute reflectivity, energy band pass, and overlapping order determination on artificial multilayers. For such measurements a Si (Li) detector and a simple x-ray tube are used. Examples of experimental results on W/Si and Mo/Si x-ray mirrors are given for the photon energy range from 5 to 40 KeV.

DOI: 10.3233/XST-1992-3303

Journal: Journal of X-Ray Science and Technology, vol. 3, no. 3, pp. 176-193, 1992