A Scanning Soft X-Ray Microscope with an Ellipsoidal Focusing Mirror

Article type: Research Article

Authors: Voss, J. | Dadras, H. | Kunz, C. | Moewes, A. | Roy, G. | Sievers, H. | Storjohann, I. | Wongel, H.

Affiliations: Universität Hamburg, 11. Institut für Experimentalphysik, Luruper Chaussee 149, D-2000 Hamburg 50, Germany

Abstract: We have developed and brought into operation a new type of scanning soft x-ray microscope which can operate at any photon energy from 20 to 1300 eV. This microscope demagnifies a diaphragm by means of an annular section of an ellipsoidal mirror to a smallest spot size of, at present, about 0.4 μm (FWHM), certainly containing only a small fraction of the total intensity. The sample is scanned across this spot. Between mirror and focus a free space of 30 mm is available for detectors, and particles emitted from a surface at more than 30° to the normal can be extracted into a mass or energy analyzer. Transmission, photoemission, luminescence, photostimulated desorption, reflectivity, and other signals may serve for imaging. In addition, a static analysis of very small samples or spots on a sample will become feasible.

DOI: 10.3233/XST-1992-3202

Journal: Journal of X-Ray Science and Technology, vol. 3, no. 2, pp. 85-108, 1992