Searching for just a few words should be enough to get started. If you need to make more complex queries, use the tips below to guide you.
Article type: Research Article
Authors: Khan Malek, C.
Affiliations: Laboratoire de Microstructures et de Microélectronique, 196 Av. H. Ravera, 92 220 Bagneux, France
Abstract: We present an outline of various microfabrication techniques and processes, particularly for applications to x-ray optics. Emphasis is placed on both high resolution diffractive components such as gratings and zone plates and multidimensional reflective diffracting structures using multilayer interference mirrors. Some selected examples are also discussed.
DOI: 10.3233/XST-1991-3105
Journal: Journal of X-Ray Science and Technology, vol. 3, no. 1, pp. 45-67, 1991
IOS Press, Inc.
6751 Tepper Drive
Clifton, VA 20124
USA
Tel: +1 703 830 6300
Fax: +1 703 830 2300
[email protected]
For editorial issues, like the status of your submitted paper or proposals, write to [email protected]
IOS Press
Nieuwe Hemweg 6B
1013 BG Amsterdam
The Netherlands
Tel: +31 20 688 3355
Fax: +31 20 687 0091
[email protected]
For editorial issues, permissions, book requests, submissions and proceedings, contact the Amsterdam office [email protected]
Inspirees International (China Office)
Ciyunsi Beili 207(CapitaLand), Bld 1, 7-901
100025, Beijing
China
Free service line: 400 661 8717
Fax: +86 10 8446 7947
[email protected]
For editorial issues, like the status of your submitted paper or proposals, write to [email protected]
如果您在出版方面需要帮助或有任何建, 件至: [email protected]