An artificial intelligence approach for the design and manufacturing of micro electro mechanical systems

Issue title: Integrated and hybrid intelligent systems in product design and development

Article type: Research Article

Authors: Liu, Tien-I^{; *} | Oh, Chong

Affiliations: Department of Mechanical Engineering California State University, Sacramento, CA 95819, USA

Correspondence: [*] Corresponding author. Tel.: +1 916 278 7963; Fax: +1 919 278 7713; E-mail: [email protected]

Abstract: Micro Electro Mechanical Systems (MEMS) is a new field. However, the application of MEMS has increased drastically for the past decade. The design and manufacturing of MEMS require specific expertise. A computerized consultant system for thorough static and dynamic analysis of MEMS is needed for design and manufacturing. A PC-based Expert System, EASYMEMS, has been developed. EASYMEMS contains domain specific knowledge of MEMS as well as the reasoning process of a human expert. It includes three sections: material, design, and manufacturing. It can be used to select the material for MEMS. It supports human reasoning and thus can offer MEMS design guidelines for engineers. It is also capable of performing thorough static and dynamic analysis and then calculating critical dimensions for the design of MEMS. Furthermore, it can be used for the consultation for MEMS manufacture. The computer graphics offered by EASYMEMS are very helpful for both MEMS design and manufacturing. In simple words, EASYMEMS is very user-friendly and is very beneficial for MEMS engineers.

DOI: 10.3233/KES-2005-9210

Journal: International Journal of Knowledge-based and Intelligent Engineering Systems, vol. 9, no. 2, pp. 159-171, 2005