An electrostatically actuated MEMS arch band-pass filter

Article type: Research Article

Authors: Ouakad, Hassen M.

Affiliations: Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals 31261, Dhahran, Kingdom of Saudi Arabia. E-mail: [email protected]

Abstract: This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.

Keywords: MEMS, arches, filters, dynamic snap-through

DOI: 10.3233/SAV-130786

Journal: Shock and Vibration, vol. 20, no. 4, pp. 809-819, 2013