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Reactions of Trichlorophosphazo-N-Sulfurylchloride and its Derivatives I. Synthesis of a New Heterocycle Containing P, N, S, and C Atoms in its Six-membered Ring. Crystal Structures of (CH3)3SiN(H)P(Cl2)NS(O2)Cl, (CH3)3SiN(CH3)P(Cl2)NS(O2)C1, and P(Cl2)NS(O2)N(H)C(CH3)N at 150 K

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