Theoretical and Experimental Investigation of X-Ray Diffraction by a Lamellar Multilayer Amplitude Grating

Article type: Research Article

Authors: Bac, S.^{; ;} | Troussel, P.^; | Sammar, A. | Guerin, P. | Ladan, F.-R. | Andre, J.-M. | Schirmann, D. | Barchewitz, R.^;

Affiliations: Laboratoire de Chimie Physique, unité associee au CNRS, U.A. 176, 11 rue Pierre et Marie Curie, 75231 Paris Cedex 05, France | Commissariat à l'Energie Atomique, Centre d'Etudes de Limeil Valenton, 94195 Villeneuve Saint Georges Cedex, France | Laboratoire pour I'Utilisation du Rayonnement Electromagnétique (LURE), Université Paris Sud, 91405 Orsay, France | Laboratoire de Microstructure et de Microélectronique, CNRS, 196 Avenue H. Ravera, 92220 Bagneux, France

Abstract: We present experimental and theoretical studies of the diffraction by an x-ray lamellar multilayer amplitude grating. The main diffraction properties of such a device are given. Experimental efficiency curves are obtained at 800 eV photon energy using synchrotron radiation. The features observed in these curves are identified and interpreted by means of two theoretical methods. Particular emphasis is given to structures observed for the first time which had been theoretically predicted.

DOI: 10.3233/XST-1995-5201

Journal: Journal of X-Ray Science and Technology, vol. 5, no. 2, pp. 161-180, 1995